Analysis of intrinsic hydrogenated amorphous silicon passivation layer growth for use in heterojunction silicon wafer solar cells by optical emission spectroscopy

• Main Authors: Ge, J., Ling, Z.P., Wong, J., Stangl, R., Aberle, A.G., Mueller, T.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/55083
• Institution: National University of Singapore

10.1063/1.4810900