Analysis of intrinsic hydrogenated amorphous silicon passivation layer growth for use in heterojunction silicon wafer solar cells by optical emission spectroscopy

Analysis of intrinsic hydrogenated amorphous silicon passivation layer growth for use in heterojunction silicon wafer solar cells by optical emission spectroscopy

10.1063/1.4810900

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Bibliographic Details
Main Authors:	Ge, J., Ling, Z.P., Wong, J., Stangl, R., Aberle, A.G., Mueller, T.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55083
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Institution:	National University of Singapore

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