Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing

• Main Authors: Xu, L. X., Xiao, S. Q., Xu, S., Zhou, H. P., Wei, D. Y., Huang, S. Y., Sern, C. C., Guo, Y. N., Khan, S.
• Other Authors: Institute of Advanced Studies
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Science::Physics
• Online Access: https://hdl.handle.net/10356/97916; http://hdl.handle.net/10220/12019
• Institution: Nanyang Technological University

Low-frequency inductively coupled plasma (ICP) has been widely used to deposit amorphous or microcrystalline Si thin films, but the intrinsic drawback namely ion bombardment effect limits its application in Si heterojunction solar cells. In this letter, we redesigned typical ICP and realized a remot...