Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing

• Main Authors: Xu, L. X., Xiao, S. Q., Xu, S., Zhou, H. P., Wei, D. Y., Huang, S. Y., Sern, C. C., Guo, Y. N., Khan, S.
• 其他作者: Institute of Advanced Studies
• 格式: Article
• 語言: English
• 出版: 2013
• 主題: DRNTU::Science::Physics
• 在線閱讀: https://hdl.handle.net/10356/97916; http://hdl.handle.net/10220/12019

Low-frequency inductively coupled plasma (ICP) has been widely used to deposit amorphous or microcrystalline Si thin films, but the intrinsic drawback namely ion bombardment effect limits its application in Si heterojunction solar cells. In this letter, we redesigned typical ICP and realized a remot...