Angular effect in laser removal of spherical silica particles from silicon wafers
10.1063/1.1359154
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sg-nus-scholar.10635-551162023-10-31T07:36:29Z Angular effect in laser removal of spherical silica particles from silicon wafers Zheng, Y.W. Lu, Y.F. Song, W.D. ELECTRICAL & COMPUTER ENGINEERING DATA STORAGE INSTITUTE 10.1063/1.1359154 Journal of Applied Physics 90 1 59-63 JAPIA 2014-06-17T02:39:22Z 2014-06-17T02:39:22Z 2001-07 Article Zheng, Y.W., Lu, Y.F., Song, W.D. (2001-07). Angular effect in laser removal of spherical silica particles from silicon wafers. Journal of Applied Physics 90 (1) : 59-63. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1359154 00218979 http://scholarbank.nus.edu.sg/handle/10635/55116 000169361100008 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.1359154 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Zheng, Y.W. Lu, Y.F. Song, W.D. |
| format |
Article |
| author |
Zheng, Y.W. Lu, Y.F. Song, W.D. |
| spellingShingle |
Zheng, Y.W. Lu, Y.F. Song, W.D. Angular effect in laser removal of spherical silica particles from silicon wafers |
| author_sort |
Zheng, Y.W. |
| title |
Angular effect in laser removal of spherical silica particles from silicon wafers |
| title_short |
Angular effect in laser removal of spherical silica particles from silicon wafers |
| title_full |
Angular effect in laser removal of spherical silica particles from silicon wafers |
| title_fullStr |
Angular effect in laser removal of spherical silica particles from silicon wafers |
| title_full_unstemmed |
Angular effect in laser removal of spherical silica particles from silicon wafers |
| title_sort |
angular effect in laser removal of spherical silica particles from silicon wafers |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55116 |
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1781412074899898368 |