Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering

Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering

10.1016/j.tsf.2010.03.109

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Bibliographic Details
Main Authors: Wong, L.M., Wang, S.J., Chim, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Aluminium zinc oxide
Ruthenium
Sputtering
Transparent conducting oxide
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55353
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Institution: National University of Singapore
Description
Summary:10.1016/j.tsf.2010.03.109

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