Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering

10.1016/j.tsf.2010.03.109

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Main Authors:	Wong, L.M., Wang, S.J., Chim, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Aluminium zinc oxide Ruthenium Sputtering Transparent conducting oxide
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55353
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55353
record_format	dspace
spelling	sg-nus-scholar.10635-553532023-10-27T07:10:52Z Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering Wong, L.M. Wang, S.J. Chim, W.K. ELECTRICAL & COMPUTER ENGINEERING Aluminium zinc oxide Ruthenium Sputtering Transparent conducting oxide 10.1016/j.tsf.2010.03.109 Thin Solid Films 518 24 SUPPL. e93-e97 THSFA 2014-06-17T02:42:07Z 2014-06-17T02:42:07Z 2010-10-01 Article Wong, L.M., Wang, S.J., Chim, W.K. (2010-10-01). Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering. Thin Solid Films 518 (24 SUPPL.) : e93-e97. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2010.03.109 00406090 http://scholarbank.nus.edu.sg/handle/10635/55353 000295942000024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Aluminium zinc oxide Ruthenium Sputtering Transparent conducting oxide
spellingShingle	Aluminium zinc oxide Ruthenium Sputtering Transparent conducting oxide Wong, L.M. Wang, S.J. Chim, W.K. Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
description	10.1016/j.tsf.2010.03.109
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wong, L.M. Wang, S.J. Chim, W.K.
format	Article
author	Wong, L.M. Wang, S.J. Chim, W.K.
author_sort	Wong, L.M.
title	Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
title_short	Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
title_full	Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
title_fullStr	Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
title_full_unstemmed	Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
title_sort	comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55353
_version_	1781412114691260416

Comparative study of aluminium-doped zinc oxide and ruthenium-aluminium co-doped zinc oxide by magnetron co-sputtering

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