Critical dimension and real-time temperature control for warped wafers

10.1016/j.jprocont.2007.11.009

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Bibliographic Details
Main Authors:	Ho, W.K., Tay, A., Fu, J., Chen, M., Feng, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Critical dimension Lithography Real-time control Wafer warpage
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55471
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55471
record_format	dspace
spelling	sg-nus-scholar.10635-554712024-11-14T02:32:22Z Critical dimension and real-time temperature control for warped wafers Ho, W.K. Tay, A. Fu, J. Chen, M. Feng, Y. ELECTRICAL & COMPUTER ENGINEERING Critical dimension Lithography Real-time control Wafer warpage 10.1016/j.jprocont.2007.11.009 Journal of Process Control 18 10 916-921 JPCOE 2014-06-17T02:43:28Z 2014-06-17T02:43:28Z 2008-12 Article Ho, W.K., Tay, A., Fu, J., Chen, M., Feng, Y. (2008-12). Critical dimension and real-time temperature control for warped wafers. Journal of Process Control 18 (10) : 916-921. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jprocont.2007.11.009 09591524 http://scholarbank.nus.edu.sg/handle/10635/55471 000261897200002 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Critical dimension Lithography Real-time control Wafer warpage
spellingShingle	Critical dimension Lithography Real-time control Wafer warpage Ho, W.K. Tay, A. Fu, J. Chen, M. Feng, Y. Critical dimension and real-time temperature control for warped wafers
description	10.1016/j.jprocont.2007.11.009
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Tay, A. Fu, J. Chen, M. Feng, Y.
format	Article
author	Ho, W.K. Tay, A. Fu, J. Chen, M. Feng, Y.
author_sort	Ho, W.K.
title	Critical dimension and real-time temperature control for warped wafers
title_short	Critical dimension and real-time temperature control for warped wafers
title_full	Critical dimension and real-time temperature control for warped wafers
title_fullStr	Critical dimension and real-time temperature control for warped wafers
title_full_unstemmed	Critical dimension and real-time temperature control for warped wafers
title_sort	critical dimension and real-time temperature control for warped wafers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55471
_version_	1821198306796109824

Critical dimension and real-time temperature control for warped wafers

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