Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

10.1088/0960-1317/22/10/105031

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Bibliographic Details
Main Authors: Koh, K.H., Qian, Y., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55536
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Institution: National University of Singapore