Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms
10.1088/0960-1317/22/10/105031
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sg-nus-scholar.10635-555362023-10-31T07:06:21Z Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms Koh, K.H. Qian, Y. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/22/10/105031 Journal of Micromechanics and Microengineering 22 10 - JMMIE 2014-06-17T02:44:12Z 2014-06-17T02:44:12Z 2012-10 Article Koh, K.H., Qian, Y., Lee, C. (2012-10). Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms. Journal of Micromechanics and Microengineering 22 (10) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/10/105031 09601317 http://scholarbank.nus.edu.sg/handle/10635/55536 000309219500031 Scopus |
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Asia |
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Singapore Singapore |
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| description |
10.1088/0960-1317/22/10/105031 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Qian, Y. Lee, C. |
| format |
Article |
| author |
Koh, K.H. Qian, Y. Lee, C. |
| spellingShingle |
Koh, K.H. Qian, Y. Lee, C. Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| author_sort |
Koh, K.H. |
| title |
Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| title_short |
Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| title_full |
Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| title_fullStr |
Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| title_full_unstemmed |
Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| title_sort |
design and characterization of a 3d mems voa driven by hybrid electromagnetic and electrothermal actuation mechanisms |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55536 |
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1781412145483743232 |