Development and evolution of MOEMS technology in variable optical attenuators

10.1117/1.2949816

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Bibliographic Details
Main Authors:	Lee, C., Yeh, J.A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Actuators Micro-optoelectromechanical systems Microelectromechanical systems Variable optical attenuators
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55602
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55602
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spelling	sg-nus-scholar.10635-556022023-10-29T22:46:33Z Development and evolution of MOEMS technology in variable optical attenuators Lee, C. Yeh, J.A. ELECTRICAL & COMPUTER ENGINEERING Actuators Micro-optoelectromechanical systems Microelectromechanical systems Variable optical attenuators 10.1117/1.2949816 Journal of Micro/ Nanolithography, MEMS, and MOEMS 7 2 - JMMMG 2014-06-17T02:44:57Z 2014-06-17T02:44:57Z 2008 Article Lee, C., Yeh, J.A. (2008). Development and evolution of MOEMS technology in variable optical attenuators. Journal of Micro/ Nanolithography, MEMS, and MOEMS 7 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.2949816 19325150 http://scholarbank.nus.edu.sg/handle/10635/55602 000257632800006 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Actuators Micro-optoelectromechanical systems Microelectromechanical systems Variable optical attenuators
spellingShingle	Actuators Micro-optoelectromechanical systems Microelectromechanical systems Variable optical attenuators Lee, C. Yeh, J.A. Development and evolution of MOEMS technology in variable optical attenuators
description	10.1117/1.2949816
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, C. Yeh, J.A.
format	Article
author	Lee, C. Yeh, J.A.
author_sort	Lee, C.
title	Development and evolution of MOEMS technology in variable optical attenuators
title_short	Development and evolution of MOEMS technology in variable optical attenuators
title_full	Development and evolution of MOEMS technology in variable optical attenuators
title_fullStr	Development and evolution of MOEMS technology in variable optical attenuators
title_full_unstemmed	Development and evolution of MOEMS technology in variable optical attenuators
title_sort	development and evolution of moems technology in variable optical attenuators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55602
_version_	1781412157861134336

Development and evolution of MOEMS technology in variable optical attenuators

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