Developments in the design of a spectroscopic scanning electron microscope

10.1016/j.nima.2005.11.063

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Main Authors: Khursheed, A., Osterberg, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55623
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-556232024-11-10T08:42:05Z Developments in the design of a spectroscopic scanning electron microscope Khursheed, A. Osterberg, M. ELECTRICAL & COMPUTER ENGINEERING Direct ray tracing Electron spectroscopy High transport efficiency Magnetic sector deflector Multi-channel detector Scanning electron microscopy Whole energy spectrum 10.1016/j.nima.2005.11.063 Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 556 2 437-444 NIMAE 2014-06-17T02:45:14Z 2014-06-17T02:45:14Z 2006-01-15 Article Khursheed, A., Osterberg, M. (2006-01-15). Developments in the design of a spectroscopic scanning electron microscope. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 556 (2) : 437-444. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2005.11.063 01689002 http://scholarbank.nus.edu.sg/handle/10635/55623 000234735300005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Direct ray tracing
Electron spectroscopy
High transport efficiency
Magnetic sector deflector
Multi-channel detector
Scanning electron microscopy
Whole energy spectrum
spellingShingle Direct ray tracing
Electron spectroscopy
High transport efficiency
Magnetic sector deflector
Multi-channel detector
Scanning electron microscopy
Whole energy spectrum
Khursheed, A.
Osterberg, M.
Developments in the design of a spectroscopic scanning electron microscope
description 10.1016/j.nima.2005.11.063
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Khursheed, A.
Osterberg, M.
format Article
author Khursheed, A.
Osterberg, M.
author_sort Khursheed, A.
title Developments in the design of a spectroscopic scanning electron microscope
title_short Developments in the design of a spectroscopic scanning electron microscope
title_full Developments in the design of a spectroscopic scanning electron microscope
title_fullStr Developments in the design of a spectroscopic scanning electron microscope
title_full_unstemmed Developments in the design of a spectroscopic scanning electron microscope
title_sort developments in the design of a spectroscopic scanning electron microscope
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55623
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