Dynamic geometric compensation for Gantry stage using iterative learning control

Dynamic geometric compensation for Gantry stage using iterative learning control

10.1109/TIM.2007.910103

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Bibliographic Details
Main Authors: Teo, C.-S., Tan, K.-K., Lim, S.-Y.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Dual-axis encoder
Dynamic compensation
Gantry stage
Iterative learning control (ILC)
Permanent-magnet linear motors (PMLMs)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55719
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/55719

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