Dynamic geometric compensation for Gantry stage using iterative learning control
10.1109/TIM.2007.910103
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sg-nus-scholar.10635-557192024-11-10T12:35:28Z Dynamic geometric compensation for Gantry stage using iterative learning control Teo, C.-S. Tan, K.-K. Lim, S.-Y. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Dual-axis encoder Dynamic compensation Gantry stage Iterative learning control (ILC) Permanent-magnet linear motors (PMLMs) 10.1109/TIM.2007.910103 IEEE Transactions on Instrumentation and Measurement 57 2 413-419 IEIMA 2014-06-17T02:46:20Z 2014-06-17T02:46:20Z 2008-02 Article Teo, C.-S., Tan, K.-K., Lim, S.-Y. (2008-02). Dynamic geometric compensation for Gantry stage using iterative learning control. IEEE Transactions on Instrumentation and Measurement 57 (2) : 413-419. ScholarBank@NUS Repository. https://doi.org/10.1109/TIM.2007.910103 00189456 http://scholarbank.nus.edu.sg/handle/10635/55719 000252338000025 Scopus |
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Asia |
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Singapore Singapore |
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Dual-axis encoder Dynamic compensation Gantry stage Iterative learning control (ILC) Permanent-magnet linear motors (PMLMs) |
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Dual-axis encoder Dynamic compensation Gantry stage Iterative learning control (ILC) Permanent-magnet linear motors (PMLMs) Teo, C.-S. Tan, K.-K. Lim, S.-Y. Dynamic geometric compensation for Gantry stage using iterative learning control |
| description |
10.1109/TIM.2007.910103 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Teo, C.-S. Tan, K.-K. Lim, S.-Y. |
| format |
Article |
| author |
Teo, C.-S. Tan, K.-K. Lim, S.-Y. |
| author_sort |
Teo, C.-S. |
| title |
Dynamic geometric compensation for Gantry stage using iterative learning control |
| title_short |
Dynamic geometric compensation for Gantry stage using iterative learning control |
| title_full |
Dynamic geometric compensation for Gantry stage using iterative learning control |
| title_fullStr |
Dynamic geometric compensation for Gantry stage using iterative learning control |
| title_full_unstemmed |
Dynamic geometric compensation for Gantry stage using iterative learning control |
| title_sort |
dynamic geometric compensation for gantry stage using iterative learning control |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55719 |
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