Effect of etch holes on quality factor of bulk-mode micromechanical resonators
10.1049/el:20081320
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sg-nus-scholar.10635-557452023-10-31T20:06:26Z Effect of etch holes on quality factor of bulk-mode micromechanical resonators Shao, L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1049/el:20081320 Electronics Letters 44 15 938-940 ELLEA 2014-06-17T02:46:37Z 2014-06-17T02:46:37Z 2008 Article Shao, L., Palaniapan, M. (2008). Effect of etch holes on quality factor of bulk-mode micromechanical resonators. Electronics Letters 44 (15) : 938-940. ScholarBank@NUS Repository. https://doi.org/10.1049/el:20081320 00135194 http://scholarbank.nus.edu.sg/handle/10635/55745 000258536400032 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1049/el:20081320 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Shao, L. Palaniapan, M. |
| format |
Article |
| author |
Shao, L. Palaniapan, M. |
| spellingShingle |
Shao, L. Palaniapan, M. Effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| author_sort |
Shao, L. |
| title |
Effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| title_short |
Effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| title_full |
Effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| title_fullStr |
Effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| title_full_unstemmed |
Effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| title_sort |
effect of etch holes on quality factor of bulk-mode micromechanical resonators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55745 |
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1781412182942023680 |