Effect of etch holes on quality factor of bulk-mode micromechanical resonators

10.1049/el:20081320

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Bibliographic Details
Main Authors: Shao, L., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55745
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Institution: National University of Singapore
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