Estimation of wafer warpage profile during thermal processing in microlithography
10.1063/1.1979468
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2014
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sg-nus-scholar.10635-559132023-10-25T20:20:04Z Estimation of wafer warpage profile during thermal processing in microlithography Tay, A. Ho, W.K. Hu, N. Chen, X. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1979468 Review of Scientific Instruments 76 7 - RSINA 2014-06-17T02:48:33Z 2014-06-17T02:48:33Z 2005-07 Article Tay, A., Ho, W.K., Hu, N., Chen, X. (2005-07). Estimation of wafer warpage profile during thermal processing in microlithography. Review of Scientific Instruments 76 (7) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1979468 00346748 http://scholarbank.nus.edu.sg/handle/10635/55913 000230436600057 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1063/1.1979468 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.K. Hu, N. Chen, X. |
| format |
Article |
| author |
Tay, A. Ho, W.K. Hu, N. Chen, X. |
| spellingShingle |
Tay, A. Ho, W.K. Hu, N. Chen, X. Estimation of wafer warpage profile during thermal processing in microlithography |
| author_sort |
Tay, A. |
| title |
Estimation of wafer warpage profile during thermal processing in microlithography |
| title_short |
Estimation of wafer warpage profile during thermal processing in microlithography |
| title_full |
Estimation of wafer warpage profile during thermal processing in microlithography |
| title_fullStr |
Estimation of wafer warpage profile during thermal processing in microlithography |
| title_full_unstemmed |
Estimation of wafer warpage profile during thermal processing in microlithography |
| title_sort |
estimation of wafer warpage profile during thermal processing in microlithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55913 |
| _version_ |
1781781078937174016 |