Fabrication of nanostructures with laser interference lithography

10.1016/j.jallcom.2006.02.115

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Bibliographic Details
Main Authors:	Xie, Q., Hong, M.H., Tan, H.L., Chen, G.X., Shi, L.P., Chong, T.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Anti-reflective coating Laser interference lithography Nanopatterning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55988
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55988
record_format	dspace
spelling	sg-nus-scholar.10635-559882023-10-29T23:05:32Z Fabrication of nanostructures with laser interference lithography Xie, Q. Hong, M.H. Tan, H.L. Chen, G.X. Shi, L.P. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE Anti-reflective coating Laser interference lithography Nanopatterning 10.1016/j.jallcom.2006.02.115 Journal of Alloys and Compounds 449 1-2 261-264 JALCE 2014-06-17T02:49:25Z 2014-06-17T02:49:25Z 2008-01-31 Article Xie, Q., Hong, M.H., Tan, H.L., Chen, G.X., Shi, L.P., Chong, T.C. (2008-01-31). Fabrication of nanostructures with laser interference lithography. Journal of Alloys and Compounds 449 (1-2) : 261-264. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jallcom.2006.02.115 09258388 http://scholarbank.nus.edu.sg/handle/10635/55988 000252737500060 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Anti-reflective coating Laser interference lithography Nanopatterning
spellingShingle	Anti-reflective coating Laser interference lithography Nanopatterning Xie, Q. Hong, M.H. Tan, H.L. Chen, G.X. Shi, L.P. Chong, T.C. Fabrication of nanostructures with laser interference lithography
description	10.1016/j.jallcom.2006.02.115
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Xie, Q. Hong, M.H. Tan, H.L. Chen, G.X. Shi, L.P. Chong, T.C.
format	Article
author	Xie, Q. Hong, M.H. Tan, H.L. Chen, G.X. Shi, L.P. Chong, T.C.
author_sort	Xie, Q.
title	Fabrication of nanostructures with laser interference lithography
title_short	Fabrication of nanostructures with laser interference lithography
title_full	Fabrication of nanostructures with laser interference lithography
title_fullStr	Fabrication of nanostructures with laser interference lithography
title_full_unstemmed	Fabrication of nanostructures with laser interference lithography
title_sort	fabrication of nanostructures with laser interference lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55988
_version_	1781781091969925120

Fabrication of nanostructures with laser interference lithography

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