Fabrication of nanostructures with laser interference lithography

10.1016/j.jallcom.2006.02.115

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Bibliographic Details
Main Authors: Xie, Q., Hong, M.H., Tan, H.L., Chen, G.X., Shi, L.P., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55988
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Institution: National University of Singapore
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