First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers

First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers

10.1023/A:1024816600152

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Bibliographic Details
Main Authors: Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Electrostatic drive
Experimental modal analysis
First harmonic (2f)
Lock-in technique
Lorentzian curve-fitting
Resonance curve area (RCA)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56066
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Institution: National University of Singapore
Description
Summary:10.1023/A:1024816600152

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