First harmonic (2f) characterisation of resonant frequency and Q-factor of micromechanical transducers
10.1023/A:1024816600152
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Main Authors: | Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/56066 |
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Institution: | National University of Singapore |
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