Geometrical error compensation and control of an XY table using neural networks

Geometrical error compensation and control of an XY table using neural networks

10.1016/j.conengprac.2005.01.003

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Bibliographic Details
Main Authors: Tan, K.K., Huang, S.N., Lee, T.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Compensation
Control
Neural network
Stability
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56131
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Institution: National University of Singapore
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