High-Q bulk-mode SOI square resonators with straight-beam anchors
10.1088/0960-1317/19/1/015017
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sg-nus-scholar.10635-562052023-10-29T22:59:39Z High-Q bulk-mode SOI square resonators with straight-beam anchors Khine, L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/19/1/015017 Journal of Micromechanics and Microengineering 19 1 - JMMIE 2014-06-17T02:51:56Z 2014-06-17T02:51:56Z 2009 Article Khine, L., Palaniapan, M. (2009). High-Q bulk-mode SOI square resonators with straight-beam anchors. Journal of Micromechanics and Microengineering 19 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/19/1/015017 09601317 http://scholarbank.nus.edu.sg/handle/10635/56205 000262344300017 Scopus |
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10.1088/0960-1317/19/1/015017 |
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ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Khine, L. Palaniapan, M. |
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Khine, L. Palaniapan, M. |
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Khine, L. Palaniapan, M. High-Q bulk-mode SOI square resonators with straight-beam anchors |
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Khine, L. |
title |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
title_short |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
title_full |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
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High-Q bulk-mode SOI square resonators with straight-beam anchors |
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High-Q bulk-mode SOI square resonators with straight-beam anchors |
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high-q bulk-mode soi square resonators with straight-beam anchors |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/56205 |
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