High-Q bulk-mode SOI square resonators with straight-beam anchors
10.1088/0960-1317/19/1/015017
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/56205 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-56205 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-562052023-10-29T22:59:39Z High-Q bulk-mode SOI square resonators with straight-beam anchors Khine, L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/19/1/015017 Journal of Micromechanics and Microengineering 19 1 - JMMIE 2014-06-17T02:51:56Z 2014-06-17T02:51:56Z 2009 Article Khine, L., Palaniapan, M. (2009). High-Q bulk-mode SOI square resonators with straight-beam anchors. Journal of Micromechanics and Microengineering 19 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/19/1/015017 09601317 http://scholarbank.nus.edu.sg/handle/10635/56205 000262344300017 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1088/0960-1317/19/1/015017 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Khine, L. Palaniapan, M. |
| format |
Article |
| author |
Khine, L. Palaniapan, M. |
| spellingShingle |
Khine, L. Palaniapan, M. High-Q bulk-mode SOI square resonators with straight-beam anchors |
| author_sort |
Khine, L. |
| title |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
| title_short |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
| title_full |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
| title_fullStr |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
| title_full_unstemmed |
High-Q bulk-mode SOI square resonators with straight-beam anchors |
| title_sort |
high-q bulk-mode soi square resonators with straight-beam anchors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56205 |
| _version_ |
1781781127853244416 |