Nonlinearities in a high-Q SOI Lamé-mode bulk resonator

Journal of Micromechanics and Microengineering

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Bibliographic Details
Main Authors: Shao, L.C., Niu, T., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56820
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Institution: National University of Singapore