12.9MHz Lame-mode differential SOI bulk resonators

12.9MHz Lame-mode differential SOI bulk resonators

10.1109/SENSOR.2007.4300492

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Bibliographic Details
Main Authors: Khine, L., Palaniapan, M., Wong, W.-K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Lamé mode
MEMS
Q
Resonators
Straight beam anchor
T-anchor
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68667
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/68667

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