12.9MHz Lame-mode differential SOI bulk resonators
10.1109/SENSOR.2007.4300492
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2014
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sg-nus-scholar.10635-686672024-11-13T21:15:44Z 12.9MHz Lame-mode differential SOI bulk resonators Khine, L. Palaniapan, M. Wong, W.-K. ELECTRICAL & COMPUTER ENGINEERING Lamé mode MEMS Q Resonators Straight beam anchor T-anchor 10.1109/SENSOR.2007.4300492 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems 1753-1756 2014-06-19T02:51:51Z 2014-06-19T02:51:51Z 2007 Conference Paper Khine, L.,Palaniapan, M.,Wong, W.-K. (2007). 12.9MHz Lame-mode differential SOI bulk resonators. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 1753-1756. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/SENSOR.2007.4300492" target="_blank">https://doi.org/10.1109/SENSOR.2007.4300492</a> 1424408423 http://scholarbank.nus.edu.sg/handle/10635/68667 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Lamé mode MEMS Q Resonators Straight beam anchor T-anchor |
| spellingShingle |
Lamé mode MEMS Q Resonators Straight beam anchor T-anchor Khine, L. Palaniapan, M. Wong, W.-K. 12.9MHz Lame-mode differential SOI bulk resonators |
| description |
10.1109/SENSOR.2007.4300492 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Khine, L. Palaniapan, M. Wong, W.-K. |
| format |
Conference or Workshop Item |
| author |
Khine, L. Palaniapan, M. Wong, W.-K. |
| author_sort |
Khine, L. |
| title |
12.9MHz Lame-mode differential SOI bulk resonators |
| title_short |
12.9MHz Lame-mode differential SOI bulk resonators |
| title_full |
12.9MHz Lame-mode differential SOI bulk resonators |
| title_fullStr |
12.9MHz Lame-mode differential SOI bulk resonators |
| title_full_unstemmed |
12.9MHz Lame-mode differential SOI bulk resonators |
| title_sort |
12.9mhz lame-mode differential soi bulk resonators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/68667 |
| _version_ |
1821206279112097792 |