6MHz bulk-mode resonator-with Q values exceeding one million

6MHz bulk-mode resonator-with Q values exceeding one million

10.1109/SENSOR.2007.4300665

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Bibliographic Details
Main Authors: Khine, L., Palaniapan, M., Wong, W.-K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Bulk-mode
Differential drive
Micromechanical
Quality factor
Resonators
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68691
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/68691

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