Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
Journal of Micromechanics and Microengineering
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Main Authors: | Shao, L.C., Niu, T., Palaniapan, M. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/56820 |
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Institution: | National University of Singapore |
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