Nonlinearities in a high-Q SOI Lamé-mode bulk resonator

Journal of Micromechanics and Microengineering

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Main Authors: Shao, L.C., Niu, T., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56820
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-568202023-08-18T09:02:02Z Nonlinearities in a high-Q SOI Lamé-mode bulk resonator Shao, L.C. Niu, T. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING Journal of Micromechanics and Microengineering 19 7 - JMMIE 2014-06-17T02:59:01Z 2014-06-17T02:59:01Z 2009 Article Shao, L.C., Niu, T., Palaniapan, M. (2009). Nonlinearities in a high-Q SOI Lamé-mode bulk resonator. Journal of Micromechanics and Microengineering 19 (7) : -. ScholarBank@NUS Repository. 09601317 http://scholarbank.nus.edu.sg/handle/10635/56820 000267516800025 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description Journal of Micromechanics and Microengineering
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Shao, L.C.
Niu, T.
Palaniapan, M.
format Article
author Shao, L.C.
Niu, T.
Palaniapan, M.
spellingShingle Shao, L.C.
Niu, T.
Palaniapan, M.
Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
author_sort Shao, L.C.
title Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_short Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_full Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_fullStr Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_full_unstemmed Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_sort nonlinearities in a high-q soi lamé-mode bulk resonator
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/56820
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