Large Q-Factor Improvement for Spiral Inductors on Silicon Using Proton Implantation

• Main Authors: Chan, K.T., Huang, C.H., Chin, A., Li, M.F., Kwong, D.-L., McAlister, S.P., Duh, D.S., Lin, W.J.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Implantation; Inductor; Q-factor; RF
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/56454
• Institution: National University of Singapore

10.1109/LMWC.2003.819383