Large Q-Factor Improvement for Spiral Inductors on Silicon Using Proton Implantation

Large Q-Factor Improvement for Spiral Inductors on Silicon Using Proton Implantation

10.1109/LMWC.2003.819383

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Bibliographic Details
Main Authors: Chan, K.T., Huang, C.H., Chin, A., Li, M.F., Kwong, D.-L., McAlister, S.P., Duh, D.S., Lin, W.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Implantation
Inductor
Q-factor
RF
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56454
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Institution: National University of Singapore

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