A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

10.1109/LED.2002.805748

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Bibliographic Details
Main Authors: Liang, Y.C., Zeng, W., Ong, P.H., Gao, Z., Cai, J., Balasubramanian, N.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Others
Published: 2014
Subjects:
Micro-electrical-mechanical systems (MEMS)
Micro-inductor
Radio frequency integrated circuit (RFIC)
System on a chip (SOC)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/67818
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/67818

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