A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

10.1109/LED.2002.805748

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Bibliographic Details
Main Authors:	Liang, Y.C., Zeng, W., Ong, P.H., Gao, Z., Cai, J., Balasubramanian, N.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Others
Published:	2014
Subjects:	Micro-electrical-mechanical systems (MEMS) Micro-inductor Radio frequency integrated circuit (RFIC) System on a chip (SOC)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/67818
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-67818
record_format	dspace
spelling	sg-nus-scholar.10635-678182023-10-30T21:48:38Z A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate Liang, Y.C. Zeng, W. Ong, P.H. Gao, Z. Cai, J. Balasubramanian, N. ELECTRICAL & COMPUTER ENGINEERING Micro-electrical-mechanical systems (MEMS) Micro-inductor Radio frequency integrated circuit (RFIC) System on a chip (SOC) 10.1109/LED.2002.805748 IEEE Electron Device Letters 23 12 700-703 EDLED 2014-06-18T05:31:29Z 2014-06-18T05:31:29Z 2002-12 Others Liang, Y.C., Zeng, W., Ong, P.H., Gao, Z., Cai, J., Balasubramanian, N. (2002-12). A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate. IEEE Electron Device Letters 23 (12) : 700-703. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2002.805748 07413106 http://scholarbank.nus.edu.sg/handle/10635/67818 000180954100005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Micro-electrical-mechanical systems (MEMS) Micro-inductor Radio frequency integrated circuit (RFIC) System on a chip (SOC)
spellingShingle	Micro-electrical-mechanical systems (MEMS) Micro-inductor Radio frequency integrated circuit (RFIC) System on a chip (SOC) Liang, Y.C. Zeng, W. Ong, P.H. Gao, Z. Cai, J. Balasubramanian, N. A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
description	10.1109/LED.2002.805748
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liang, Y.C. Zeng, W. Ong, P.H. Gao, Z. Cai, J. Balasubramanian, N.
format	Others
author	Liang, Y.C. Zeng, W. Ong, P.H. Gao, Z. Cai, J. Balasubramanian, N.
author_sort	Liang, Y.C.
title	A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
title_short	A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
title_full	A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
title_fullStr	A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
title_full_unstemmed	A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
title_sort	concise process technology for 3-d suspended radio frequency micro-inductors on silicon substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/67818
_version_	1781782924682592256

A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate

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