A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate
10.1109/LED.2002.805748
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Main Authors: | Liang, Y.C., Zeng, W., Ong, P.H., Gao, Z., Cai, J., Balasubramanian, N. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Others |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/67818 |
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Institution: | National University of Singapore |
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