Experimental characterization of the effect of metal dummy fills on spiral inductors

Experimental characterization of the effect of metal dummy fills on spiral inductors

10.1109/RFIC.2007.380889

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Bibliographic Details
Main Authors: Nan, L., Mouthaan, K., Xiong, Y.-Z., Shi, J., Rustagi, S.C., Ooi, B.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Chemical-mechanical polishing process (CMP)
CMOS technology
Metal dummy fills
Microwave measurements
Spiral inductors
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70242
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/70242

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