Experimental characterization of the effect of metal dummy fills on spiral inductors

10.1109/RFIC.2007.380889

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Bibliographic Details
Main Authors:	Nan, L., Mouthaan, K., Xiong, Y.-Z., Shi, J., Rustagi, S.C., Ooi, B.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Chemical-mechanical polishing process (CMP) CMOS technology Metal dummy fills Microwave measurements Spiral inductors
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70242
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70242
record_format	dspace
spelling	sg-nus-scholar.10635-702422023-10-25T22:02:54Z Experimental characterization of the effect of metal dummy fills on spiral inductors Nan, L. Mouthaan, K. Xiong, Y.-Z. Shi, J. Rustagi, S.C. Ooi, B.-L. ELECTRICAL & COMPUTER ENGINEERING Chemical-mechanical polishing process (CMP) CMOS technology Metal dummy fills Microwave measurements Spiral inductors 10.1109/RFIC.2007.380889 Digest of Papers - IEEE Radio Frequency Integrated Circuits Symposium 307-310 2014-06-19T03:09:51Z 2014-06-19T03:09:51Z 2007 Conference Paper Nan, L., Mouthaan, K., Xiong, Y.-Z., Shi, J., Rustagi, S.C., Ooi, B.-L. (2007). Experimental characterization of the effect of metal dummy fills on spiral inductors. Digest of Papers - IEEE Radio Frequency Integrated Circuits Symposium : 307-310. ScholarBank@NUS Repository. https://doi.org/10.1109/RFIC.2007.380889 1424405319 15292517 http://scholarbank.nus.edu.sg/handle/10635/70242 000248148800069 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Chemical-mechanical polishing process (CMP) CMOS technology Metal dummy fills Microwave measurements Spiral inductors
spellingShingle	Chemical-mechanical polishing process (CMP) CMOS technology Metal dummy fills Microwave measurements Spiral inductors Nan, L. Mouthaan, K. Xiong, Y.-Z. Shi, J. Rustagi, S.C. Ooi, B.-L. Experimental characterization of the effect of metal dummy fills on spiral inductors
description	10.1109/RFIC.2007.380889
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Nan, L. Mouthaan, K. Xiong, Y.-Z. Shi, J. Rustagi, S.C. Ooi, B.-L.
format	Conference or Workshop Item
author	Nan, L. Mouthaan, K. Xiong, Y.-Z. Shi, J. Rustagi, S.C. Ooi, B.-L.
author_sort	Nan, L.
title	Experimental characterization of the effect of metal dummy fills on spiral inductors
title_short	Experimental characterization of the effect of metal dummy fills on spiral inductors
title_full	Experimental characterization of the effect of metal dummy fills on spiral inductors
title_fullStr	Experimental characterization of the effect of metal dummy fills on spiral inductors
title_full_unstemmed	Experimental characterization of the effect of metal dummy fills on spiral inductors
title_sort	experimental characterization of the effect of metal dummy fills on spiral inductors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70242
_version_	1781783146618945536

Experimental characterization of the effect of metal dummy fills on spiral inductors

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