Experimental characterization of the effect of metal dummy fills on spiral inductors

• Main Authors: Nan, L., Mouthaan, K., Xiong, Y.-Z., Shi, J., Rustagi, S.C., Ooi, B.-L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Chemical-mechanical polishing process (CMP); CMOS technology; Metal dummy fills; Microwave measurements; Spiral inductors
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70242
• Institution: National University of Singapore

10.1109/RFIC.2007.380889