Metallization proximity studies for copper spiral inductors on silicon

• Main Authors: Sia, Choon Beng, Yeo, Kiat Seng, Do, Manh Anh, Ma, Jianguo
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/91040; http://hdl.handle.net/10220/6016
• Institution: Nanyang Technological University

The impacts of metallization proximity for copper spiral inductors on silicon have been investigated in this paper. Performance of the spiral inductor versus area consumption tradeoff with respect to its core diameter is evaluated quantitatively for the first time. Effects of the inductor’s proxi...