Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition

10.1116/1.1767829

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Bibliographic Details
Main Authors:	Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Yang, B.J., Liew, T.Y.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56459
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-564592023-11-01T07:04:40Z Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Yang, B.J. Liew, T.Y.F. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1767829 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 4 1731-1737 JVTBD 2014-06-17T02:54:49Z 2014-06-17T02:54:49Z 2004-07 Article Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Yang, B.J., Liew, T.Y.F. (2004-07). Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (4) : 1731-1737. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1767829 10711023 http://scholarbank.nus.edu.sg/handle/10635/56459 000223925300020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1767829
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Yang, B.J. Liew, T.Y.F.
format	Article
author	Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Yang, B.J. Liew, T.Y.F.
spellingShingle	Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Yang, B.J. Liew, T.Y.F. Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
author_sort	Chen, X.Y.
title	Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
title_short	Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
title_full	Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
title_fullStr	Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
title_full_unstemmed	Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
title_sort	laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56459
_version_	1781781183011487744

Laser annealing of silicon nanocrystal films prepared by pulsed-laser deposition

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