Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Hu, H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84179
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Institution: National University of Singapore