Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Hu, H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84179
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-841792015-01-08T02:32:39Z Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Hu, H. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 762 87-92 MRSPD 2014-10-07T04:49:42Z 2014-10-07T04:49:42Z 2003 Conference Paper Chen, X.Y.,Lu, Y.F.,Wu, Y.H.,Cho, B.J.,Hu, H. (2003). Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas. Materials Research Society Symposium - Proceedings 762 : 87-92. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/84179 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Chen, X.Y.
Lu, Y.F.
Wu, Y.H.
Cho, B.J.
Hu, H.
format Conference or Workshop Item
author Chen, X.Y.
Lu, Y.F.
Wu, Y.H.
Cho, B.J.
Hu, H.
spellingShingle Chen, X.Y.
Lu, Y.F.
Wu, Y.H.
Cho, B.J.
Hu, H.
Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
author_sort Chen, X.Y.
title Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
title_short Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
title_full Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
title_fullStr Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
title_full_unstemmed Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
title_sort silicon nanostructured films formed by pulsed-laser deposition in inert gas and reactive gas
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84179
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