Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas
Materials Research Society Symposium - Proceedings
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2014
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sg-nus-scholar.10635-841792015-01-08T02:32:39Z Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Hu, H. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 762 87-92 MRSPD 2014-10-07T04:49:42Z 2014-10-07T04:49:42Z 2003 Conference Paper Chen, X.Y.,Lu, Y.F.,Wu, Y.H.,Cho, B.J.,Hu, H. (2003). Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas. Materials Research Society Symposium - Proceedings 762 : 87-92. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/84179 NOT_IN_WOS Scopus |
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Materials Research Society Symposium - Proceedings |
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ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Hu, H. |
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Conference or Workshop Item |
author |
Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Hu, H. |
spellingShingle |
Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Hu, H. Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas |
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Chen, X.Y. |
title |
Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas |
title_short |
Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas |
title_full |
Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas |
title_fullStr |
Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas |
title_full_unstemmed |
Silicon Nanostructured Films Formed by Pulsed-Laser Deposition in Inert Gas and Reactive Gas |
title_sort |
silicon nanostructured films formed by pulsed-laser deposition in inert gas and reactive gas |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/84179 |
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1681089571226386432 |