Modal coupling in micromechanical vibratory rate gyroscopes
10.1109/JSEN.2006.881432
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sg-nus-scholar.10635-566522023-10-30T09:53:53Z Modal coupling in micromechanical vibratory rate gyroscopes Srikantha Phani, A. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J.A. ELECTRICAL & COMPUTER ENGINEERING Micromechanical gyroscope Resonant coupling Surface micromachining 10.1109/JSEN.2006.881432 IEEE Sensors Journal 6 5 1144-1152 2014-06-17T02:57:02Z 2014-06-17T02:57:02Z 2006-10 Article Srikantha Phani, A., Seshia, A.A., Palaniapan, M., Howe, R.T., Yasaitis, J.A. (2006-10). Modal coupling in micromechanical vibratory rate gyroscopes. IEEE Sensors Journal 6 (5) : 1144-1152. ScholarBank@NUS Repository. https://doi.org/10.1109/JSEN.2006.881432 1530437X http://scholarbank.nus.edu.sg/handle/10635/56652 000240698200015 Scopus |
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Micromechanical gyroscope Resonant coupling Surface micromachining |
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Micromechanical gyroscope Resonant coupling Surface micromachining Srikantha Phani, A. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J.A. Modal coupling in micromechanical vibratory rate gyroscopes |
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10.1109/JSEN.2006.881432 |
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ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Srikantha Phani, A. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J.A. |
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Article |
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Srikantha Phani, A. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J.A. |
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Srikantha Phani, A. |
title |
Modal coupling in micromechanical vibratory rate gyroscopes |
title_short |
Modal coupling in micromechanical vibratory rate gyroscopes |
title_full |
Modal coupling in micromechanical vibratory rate gyroscopes |
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Modal coupling in micromechanical vibratory rate gyroscopes |
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Modal coupling in micromechanical vibratory rate gyroscopes |
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modal coupling in micromechanical vibratory rate gyroscopes |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/56652 |
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