Modal coupling in micromechanical vibratory rate gyroscopes

• Main Authors: Srikantha Phani, A., Seshia, A.A., Palaniapan, M., Howe, R.T., Yasaitis, J.A.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Micromechanical gyroscope; Resonant coupling; Surface micromachining
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/56652
• Institution: National University of Singapore

10.1109/JSEN.2006.881432