Near-field enhanced femtosecond laser nano-drilling of glass substrate

10.1016/j.jallcom.2006.02.110

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Bibliographic Details
Main Authors: Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Lukyanchuk, B.S., Wang, Z.B.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56773
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Institution: National University of Singapore