Nanopatterning mask fabrication by femtosecond laser irradiation

10.1016/j.jmatprotec.2007.04.058

Saved in:
Bibliographic Details
Main Authors: Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Luk'yanchuk, B.S., Lim, C.S., Wang, Z.B.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50989
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore