Nanopatterning mask fabrication by femtosecond laser irradiation

• Main Authors: Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Luk'yanchuk, B.S., Lim, C.S., Wang, Z.B.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Laser; Nanofabrication; Non-linear absorption; Optical near field; Surface plasmon
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/50989
• Institution: National University of Singapore

10.1016/j.jmatprotec.2007.04.058