Nanopatterning mask fabrication by femtosecond laser irradiation

10.1016/j.jmatprotec.2007.04.058

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Bibliographic Details
Main Authors:	Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Luk'yanchuk, B.S., Lim, C.S., Wang, Z.B.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Laser Nanofabrication Non-linear absorption Optical near field Surface plasmon
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/50989
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-50989
record_format	dspace
spelling	sg-nus-scholar.10635-509892023-10-27T07:18:50Z Nanopatterning mask fabrication by femtosecond laser irradiation Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Luk'yanchuk, B.S. Lim, C.S. Wang, Z.B. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE Laser Nanofabrication Non-linear absorption Optical near field Surface plasmon 10.1016/j.jmatprotec.2007.04.058 Journal of Materials Processing Technology 192-193 212-217 JMPTE 2014-04-24T07:23:17Z 2014-04-24T07:23:17Z 2007-10-01 Article Zhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Luk'yanchuk, B.S., Lim, C.S., Wang, Z.B. (2007-10-01). Nanopatterning mask fabrication by femtosecond laser irradiation. Journal of Materials Processing Technology 192-193 : 212-217. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmatprotec.2007.04.058 09240136 http://scholarbank.nus.edu.sg/handle/10635/50989 000249314100032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser Nanofabrication Non-linear absorption Optical near field Surface plasmon
spellingShingle	Laser Nanofabrication Non-linear absorption Optical near field Surface plasmon Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Luk'yanchuk, B.S. Lim, C.S. Wang, Z.B. Nanopatterning mask fabrication by femtosecond laser irradiation
description	10.1016/j.jmatprotec.2007.04.058
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Luk'yanchuk, B.S. Lim, C.S. Wang, Z.B.
format	Article
author	Zhou, Y. Hong, M.H. Fuh, J.Y.H. Lu, L. Luk'yanchuk, B.S. Lim, C.S. Wang, Z.B.
author_sort	Zhou, Y.
title	Nanopatterning mask fabrication by femtosecond laser irradiation
title_short	Nanopatterning mask fabrication by femtosecond laser irradiation
title_full	Nanopatterning mask fabrication by femtosecond laser irradiation
title_fullStr	Nanopatterning mask fabrication by femtosecond laser irradiation
title_full_unstemmed	Nanopatterning mask fabrication by femtosecond laser irradiation
title_sort	nanopatterning mask fabrication by femtosecond laser irradiation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/50989
_version_	1781411643409825792

Nanopatterning mask fabrication by femtosecond laser irradiation

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