Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy

Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy

10.1116/1.1481865

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Bibliographic Details
Main Authors: Huang, S.M., Hong, M.H., Luk'yanchuk, B.S., Lu, Y.F., Song, W.D., Chong, T.C.
Other Authors: DATA STORAGE INSTITUTE
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71892
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/71892

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