Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy
10.1116/1.1481865
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2014
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sg-nus-scholar.10635-718922023-09-03T20:56:58Z Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy Huang, S.M. Hong, M.H. Luk'yanchuk, B.S. Lu, Y.F. Song, W.D. Chong, T.C. DATA STORAGE INSTITUTE ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1481865 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 3 1118-1125 JVTBD 2014-06-19T03:29:01Z 2014-06-19T03:29:01Z 2002-05 Conference Paper Huang, S.M., Hong, M.H., Luk'yanchuk, B.S., Lu, Y.F., Song, W.D., Chong, T.C. (2002-05). Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 (3) : 1118-1125. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1481865 10711023 http://scholarbank.nus.edu.sg/handle/10635/71892 000176358300057 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.1481865 |
| author2 |
DATA STORAGE INSTITUTE |
| author_facet |
DATA STORAGE INSTITUTE Huang, S.M. Hong, M.H. Luk'yanchuk, B.S. Lu, Y.F. Song, W.D. Chong, T.C. |
| format |
Conference or Workshop Item |
| author |
Huang, S.M. Hong, M.H. Luk'yanchuk, B.S. Lu, Y.F. Song, W.D. Chong, T.C. |
| spellingShingle |
Huang, S.M. Hong, M.H. Luk'yanchuk, B.S. Lu, Y.F. Song, W.D. Chong, T.C. Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| author_sort |
Huang, S.M. |
| title |
Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| title_short |
Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| title_full |
Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| title_fullStr |
Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| title_full_unstemmed |
Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| title_sort |
sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71892 |
| _version_ |
1776257380517937152 |