Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy

• Main Authors: Huang, S.M., Hong, M.H., Luk'yanchuk, B.S., Lu, Y.F., Song, W.D., Chong, T.C.
• Other Authors: DATA STORAGE INSTITUTE
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71892
• Institution: National University of Singapore

10.1116/1.1481865